NUFAB – Cleanroom
Tech Institute, L288
Tel: (847) 491-5959
Facility Director: Chang Liu, Mechanical Engineering
Facility Manager: Dr. Nasir Basit, Mechanical Engineering
NUFAB is an advanced nanotechnology research facility at Northwestern University. It provides resources for research in MEMs/NEMs, nano-bio, nano/microelectronics, and other related and interdisciplinary areas to Northwestern University community and outside researchers. It currently resides in EG20-NG32 Technological Institute and has all new research equipment. In 2011, it will relocate to a new clean room facility at FG infill that is under design/construction. Many more new research tools will be added at that time.
Vist the NUFAB website here.
EQUIPMENT:
1. Electrical Test Station
2. Stylus Profilometer - Veeco Dektak-8
3. Reflectometer - Filmetrics F20
4. Microscope - Nikon LV150
5. Plasma Enhanced Chemical Vapor Deposition (PECVD) - STS LpX CVD
6. Thermal Evaporator - Denton Vacuum Explorer 14
7. Sputtering - AJA Orion Sputter
8. Parylene Coater - SCS Labcoter2 Parylene Deposition System
9. Deep Reactive Ion Etcher (DRIE) - STS LpX Pegasus
10. Reactive Ion Etcher (RIE) - Samco RIE-10NR
11. Aligner - Suss MABA6 Mask Aligner
12. Spinner Hood
13. Convection Ovens - BlueM DCC-146C
14. Microscope - Nikon LV150
15. Develop Hood
16. UV Flood Exposure System - Inpro Technologies F300S
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