Materials Processing & Microfabrication Facility – Cleanroom

Cook Hall, 4026
Tel: (847) 491-5959
Facility Director: Bruce Wessels, MSE
Facility Manager: Dr. Anil Dhote, MSE

The Materials Research Center (MRC) cleanroom facility is devoted to materials processing, growth, device fabrication, and electronic & photonic materials. The MRC cleanroom complex in Cook Hall provides microfabrication and thin film processing capabilities. The facility includes class 100 and 1000 cleanrooms. The facility provides microfabrication tools for general use by the Northwestern community, government and industrial researchers. Various techniques are available for the growth, preparation, and processing of a wide range of thin film materials including in-process characterization. Training on equipment and assisted use within the MPCGF is available to provide the necessary expertise.

This facility provides a centralized resource for the deposition of metal, semiconductor & dielectric thin films, photolithography, and processing. Standard microfabrication processes have been established. Available techniques include plasma enhanced chemical vapor deposition, e-beam evaporation, reactive ion etching, photolithography and some characterization instrumentation.

EQUIPMENT:

List of Equipment Fees.

1. Quintel Q-2000 Mask Aligner
2. Quintel Q-4000 Mask Aligner (0.5 µ m)
3. Headway Spinners-Programmable
4. Baking Furnace
5. Oxford Instruments µ P 80 Plasma Enhanced Chemical Vapor Deposition (PECVD)
6. Edwards Auto 306 e-beam Evaporator
7. Edwards Auto 500 FL400 e-beam Evaporator
8. Oxford Instruments µ P 80 Reactive Ion Etching (RIE)
9. Kulicke & Soffa 4524D Ball-Ball Wire Bonder
10. West Bond 7374E Wedge-Wedge Wire Bonder
11. Filmetrics F-20 Thin Film Analyzer
12. Metricon 2010 Prism Coupler
13. Hall Effect Measurements
14. Tencore P-10 Surface Profiler
15. Omano Microscope
16. Photolithography Wet Bench
17. Digital Hotplates
18. Chemical Hoods
19. SUSS MicroTek MA6/BA6 Mask Aligner